Geometry Details Influenced on Vibratory Microgyroscope Performance

MEMS vibratory gyroscope is device which is in most cases a complex system vibrating in two orthogonal directions - it consists of two parts: resonator (drive direction) and accelerometer (sense direction). The most important quantity of gyroscope is inertial mass and suspensions, which are crucial elements of natural frequencies of both modes related to motion directions. In this paper there are presented analysis of results of simulations regarding influence of particular geometry details on natural frequency change and influence on performance of such device.