Modelling of Microelectromechanical Inertial Sensors

the paper deals with a mathematical model of inertial sensor based on the technology of microelectromechanical systems. Features of modelling on the basis of the developed model are given. The presented model takes into consideration all errors given in the specification of performances developed by a manufacturer of inertial sensors (Analog Devices). Random errors of the inertial sensor are formed based on the concept of power spectral density. Such an approach allows using possibilities of modern software to create a mathematical model. A mathematical model of the configuration of inertial sensors with the collinear orientation of sensors sensitivity axes is developed. Results of the modelling by means of developed mathematical models are represented.