A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution

An integrated 11-bit 2-D CMOS stress sensor is presented with 66dB of dynamic range, measuring -100 to 360MPa, and <; 1LSB error over temperature from 5°C to 90°C. N-Well-based primary elements enable accurate sensing of stress magnitude and angle, and allow repeatable error compensation.