Suspended Group III-V Waveguides Integrated on Silicon Substrates for Mid-Infrared Photonics

We demonstrate wafer-scale integration of suspended $\text{A}1_{0.32}\text{Ga}_{0.68}\text{As}$ nanophotonic waveguides on silicon substrates. Micro-ring resonators are fabricated and measured at $\lambda=1545$ and 2305 nm, showing loaded quality factors of 740,000 and 450,000, respectively. © 2019 The Author(s)