Parametric macromodels for the RF behaviour of capacitive switches

This article proposes a new methodology dedicated to the extraction of RF parametric macro-models for electrostatically actuated micro switches. The sensitivities of the geometric parameters of the macro-model's components are calculated and inserted into a parametric RF macro-model. The extraction algorithm uses the results obtained from three RF simulations performed on the field model of the device. The solving of the numerical problem was performed with the finite integrals technique and using a closed form fitting procedure for the TL-lumped macro-model. A procedure that calculates the sensitivity of the RF output with respect to the parameter that varies is included in a finite integration technique in-house code. The methodology is validated for a capacitive switch from the literature.