A Novel Multiple-Frequency RF-MEMS Resonator Based on the Whispering Gallery Modes

A novel microelectromechanical system (MEMS) disk resonator based on the whispering gallery modes (WGMs) has been demonstrated. With the optimized structure of the multi-electrodes, multiple WGMs can be easily excited by a pair of electrodes. For a disk resonator of 37 μm in radius, resonance frequencies of 56-170 MHz and high-quality factor (Q) around 10 000 in the atmosphere are obtained. In the meantime, a single WGM can be realized under a specific electrodes connection. Multiple-frequency outputs from the single resonator could dramatically simplify the communication system and reduce the power consumption of a digital system.