Integrated Filter and RF Front-end Module on RF SOI

This work reports a monolithically integrated filter and RF front-end module architecture on 200-mm 7SWTSOI RFSOI technology. Multiple bulk acoustic wave (BAW) and Lamb wave filters are vertically integrated to RFSOI switches to demonstrate a variety of RF front-end modules. Vertical integration enables higher-density modules with reduced footprint and minimum impact in the electrical performance of the filters. This architecture demonstrates to be suitable for 5G new radio (NR) and LTE applications.