MEMS type hot cathode ion gauge

In this paper, the design and simulation of MEMS-type hot cathode ionization gauge is presented. The design is 2.4mm×0.8mm×1.4mm and can be fabricated with MMES technology. The design can measure in the HV and UHV range up to 10-9 torr vacuum. In this paper, various types of cathode creation methods are considered, and the preferred type is chosen as the proposed scheme. The cathode design is in a way that the temperature is uniform throughout it and remains almost constant with the vacuum pressure change. Simulation of CPT of COMSOL was performed to simulate the ionization process, and the sensitivity coefficient was obtained by simulation method. The simulation results in this design show the sensitivity factor of 0.6.