Optimization of MEMS PZR Carbon dioxide Sensor

In recent years, MEMS cantilever-based CO₂ gas sensors have got a great attention in medical diagnoses, clinical purpose, health care, environmental monitoring and medicine industry etc. MATLAB software is used in analytical modeling and virtual micro-fabrication of the optimized carbon dioxide sensor is done using Intellisuite software. Electromagnetic actuation is used to drive the micro-cantilever in the dynamic mode while the sensing is done through fully differential piezoresistors. Piezoresistors are designed on the cantilever top surface on a suitable location close to the fixed end where maximum stress occurs. ZnO polymer layer is coated on the cantilever surface for the adsorption of the target analytes. According to analytical results of the optimized sensor, the maximum amplitude, resonance frequency and quality factor has been measured 10.4 μm, 64118Hz, 241 respectively, while the simulation measurements have been found to be 9.7μm, 64132Hz, 243 respectively. The sensitivity of the sensor is found to be 0.527 mHz/ppm analytically and 0.500 mHz/ppm sensitivity is observed through simulation. Final output from the fully differential bridge is in nano volts range.