Extraction of (R,L,C,G) interconnect parameters in 2D transmission lines using fast and efficient numerical tools

We present a new simulation method for a fast and efficient extraction of frequency dependent R,L,C,G parameters in 2D transmission line structures embedded in a multilayered dielectric environment. Our method is based on two variational finite element formulations and use very efficient numerical tools (fictitious domain approach (Putot et al., 1999), fast solver, domain decomposition). It needs only an unstructured mesh of the conductor boundaries and is very memory and CPU time efficient. The results are validated on test structures with an original method of measurements and characterization.