Actuation Voltage Analysis Using FEM of RF MEMS Switch Design for Low Power Consumption Application

This paper represents the analysis of RF MEMS perforated shunt switch which is designed on hafniumoxide substrate with stiff ribs around the membrane. The switch has used rectangular perforation with various sizes. With the help of perforation and adding serpentine meanders the problems of high actuation voltages, low switching speed, less flexibility and stiction in RF MEMS switch have been removed. The proposed switch attains high switching speed and low electrostatic actuation voltages. The perforation and meanders are joined with Fixed-fixed shunt switch. The pull in voltage provides maximum displacement in negative z-direction. The switch is designed on software COMSOL^® MULTIPHYSICS 4.3b.