Buried passive elements manufactured in LTCC

Electrical performance of LTCC buried 3D inductors and capacitors was tested. The circuits tested were multilayer wire patterns occupying eight layers of DuPont 951AX. The motivation of this study was to find out the available Q, C and L of LTCC buried lumped elements. The effect of shielding electrical ground on lumped element parasitics was of particular interest. A result to be pointed out is the inductor design rule for highest possible Q*L/size for the tested double helical inductor structure. Maximum measured Q for 6.0 nH inductor was 83. The corresponding size was 3.5/spl times/3.5/spl times/1.6 mm/sup 3/.