MEMS-Based Vibrational Energy Harvesting and Conversion Employing Micro-/Nano-Magnetics

This paper discusses the current state-of-the-art, ongoing fundamental and technical challenges and potential roadmaps for micro-scale vibration energy harvesting and power conversion devices employing micro-/nano-magnetics. Such devices are of paramount importance as powering solution for autonomous and ubiquitous sensor nodes within the emerging “Internet of Things (IoT).” In this paper, we have reviewed the fundamental limitations, technological needs, and breakthroughs in the mentioned areas, including materials, process integration, and device design issues. Particularly, current limitations in both the relevant soft and hard (or permanent) micro-magnets, roadmaps for a complete “Magnetic MEMS” solution for energy harvesting and efficient low-power conversion for “IoT” applications, are discussed.