Feedback Feed-Forward Control of Piezoelectric Positioning Stages and Experimental Evaluation

This study addresses the problem of precise tracking control for a piezoelectric positioning stage (PZT). In order to make full use of the advantages of feedback and feed-forward control, in this paper, the feedback and feed-forward iterative learning control with inverse hysteresis compensation (FFILCWIH) has been proposed to control of the PZT. First, the architecture of the PZT platform is introduced, then, the model of PZT is identified with experimental data, furthermore, five control algorithms are performed on the PZT experimental platform. The results show that the FFILCWIH method is especially suitable for tracking the triangular waveform signal.