Qubit Device Integration Using Advanced Semiconductor Manufacturing Process Technology | IEEE Conference Publication | IEEE Xplore

Qubit Device Integration Using Advanced Semiconductor Manufacturing Process Technology


Abstract:

Quantum computing's value proposition of an exponential speedup in computing power for certain applications has propelled a vast array of research across the globe. While...Show More

Abstract:

Quantum computing's value proposition of an exponential speedup in computing power for certain applications has propelled a vast array of research across the globe. While several different physical implementations of device level qubits are being investigated, semiconductor spin qubits have many similarities to scaled transistors. In this article, we discuss the device/integration of full 300mm based spin qubit devices. This includes the development of (i) a 28Si epitaxial module ecosystem for growing isotopically pure substrates with among the best Hall mobility at these oxide thicknesses, (ii) a custom 300mm qubit testchip and integration/device line, and (iii) a novel dual nested gate integration process for creating quantum dots.
Date of Conference: 01-05 December 2018
Date Added to IEEE Xplore: 17 January 2019
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Conference Location: San Francisco, CA, USA

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