Integrated Thin Film Silicon Detectors for Fluorescence Sensing

The design, fabrication and test of a thin film Si chip-scale fluorescence sensor designed for integration with microfluidic systems is reported. The photodetector has low dark current (pA) and responsivity of 0.3 A/W at 532 nm. Droplets of 10 microliter with varying fluorophore concentrations were tested and the data is linear with a model fit with 95% confidence and signal to noise ratios greater than 20 dB.