Adding CNT-based functionality to MEMS: A technology demonstration for strain and IR sensors on wafer scale

Pronounced trends like Industry 4.0, the Internet of Things or flexible electronics obligate new and innovative approaches for scalable fabrication of electronics and sensors implementing also functional nanomaterials like carbon nanotubes (CNTs). On the example of two application examples requiring different CNT integration approaches, we demonstrate the feasibility of fusing conventional MEMS with CNT- technology. First, a miniaturized strain sensor utilizing high sensitivity and detection of small displacements down to epsilon ~ 0.1% is demonstrated. The second demonstrator addresses the application field of thermal infrared sensing and gas detection in environmental condition monitoring. Here, the CNT 'forest' act as black layer for infrared (IR) applications featuring high broadband absorption of more than 95% for wavelengths up to 12 micrometer.