Displacement of Microparticles on Surface Acoustic Wave Delay Line Using High RF Power

In this paper we investigate the displacement of microparticles deposited on the acoustic path of a surface acoustic wave delay line. The diameter of the targeted particles is between 0.3 μm and 10 μm. The device used is based on Rayleigh waves and builds on 128°YX-LiNbO
₃
piezoelectric substrate. The displacement is achieved by applying a radiofrequency signal with a high power level superior to 30 dBm at approximately 100 MHz. Particles originates from the fume of a burning candle with diameter smaller than 2.5 μm, and particles of silicon carbide in the vicinity of 17 μm and 5 μm are tested.