A 6-Degree-of-Freedom Piezoelectric Vibration Microstage with Reduced Cross-Axis Coupling

Increasing the number of degree of freedom and reducing the cross-axis coupling simultaneously is a critical challenge for the development of advanced micro stage. Herein, resulting from introducing a new two-stage symmetric geometry by the combination of spring-shaped beam and crab-leg-like anchor, a six-degree-of-freedom (6-DOF)multi-axis microstage is proposed in this paper. This microstage well responses the above challenge, which allows precise control of movements in both translational and tilting modes along three axes. A 2mmX2mm positioning microstage with four suspended pairs of crab-leg anchors and spring beams made of PZT/Si bimorph layers. Finite element simulation results show that this microstage attained a large displacement in all 6-DOF domains, and moreover the cross-axis coupling is reduced significantly. The equilibrium of large displacement, multi-degree of freedom and weak cross-axis coupling is realized by using this novel two-stage symmetric strategies.