Dummy gated radio frequency VDMOSFET with high breakdown voltage and low feedback capacitance

In this paper, a novel radio frequency power device called dummy gated VDMOS has been proposed and demonstrated experimentally. The new device is produced using the standard RF VDMOS process technology. An improvement in breakdown voltage by 20% is realized, while the feedback capacitance C/sub rss/ is reduced by three times leading to a desired HF performance and high reliability.