(Invited) Wave-Matter Interactions at the Chip Scale: Devices, Systems and Opportunities

In this paper, we review the recent progress on microelectronic devices and systems, which utilize different modalities of wave-matter interactions for emerging applications. Targeting at the rotational modes of gas molecules in low-THz regime, a dual-frequency-comb spectrometer in CMOS is presented, which leverages high parallelism in ultra-broadband spectral sensing. Wide molecular identification range and absolute specificity are demonstrated. Next, Based on the same principle, a CMOS molecular clock is built, which references its 80-MHz output to a 231.061-GHz transition line of carbonyl sulfide molecules. The clock delivers a long-term frequency instability at 10^-10 level, and potentially at 10^-11 and below in the future. The vibrational modes of large bio-molecules possess great potentials in medical diagnosis, signal generation in the mid-THz range is required. To this end, a SiGe radiator array which delivers a record total radiated power of 0.1 mW at 1 THz is shown. Lastly, the paper reviews a CMOS magnetometer work, which is based on electronic spin resonance of nitrogen-vacancy centers in diamond. This is the first demonstration of CMOS-integrated quantum sensing.