The Design of Low-Loss Phase Shifter Based on MEMS Switch

In this paper, a 2-bit reflection-type digital phase shifter based on MEMS switch is designed to replace the high-loss phase shifter based on PIN diode. This design uses 3dB directional coupler and integrated SP4T (single-pole-four-throw) micro-electro-mechanical systems(MEMS) switch. ADGM1304 is used as MEMS switch to overcome the disadvantages of traditional digital phase shifter which has high insertion loss. 0°,90°,180° and 270°phase shift are realized with insertion loss less than 1.5 dB in a bandwidth from 2.6 GHz to 3.2GHz.