Differential Pressure Sensor Using Silicon on Insulator Back to Back Cantilever Structure

In our day to day life differential pressure sensor can be used in much application. This type of pressure sensors are used for measuring the difference between two different pressure levels. Mostly bulk micro machined fabrication tool is used for fabrication process. Hence these type sensors have low cost and reliable than normal conventional sensor. This sensor is designed mainly to compare both the pressure below and above the liquid and flow rates and measures changes in pressure across restriction. The output differential pressure sensor varies with respect to the change in pressure level at up (or) down cantilever beam. When the pressure value at bottom side is high, when the membrane deflect towards forward direction (i.e.) moves upward. when the pressure value at which the bottom side is lower than the membrane deflects to backward direction (moves downward). This design is mainly used in domestic and industrial application.