W-Band Millimeter-wave On-chip Log-Periodic Dipole Antenna with Integrated Balun Filter in GIPD Process

A W-band log-periodic antenna with integrated balun-bandpass filter (BPF) fabricated with general integrated passive device (GIPD) technology is presented. The GIPD process with high resistivity Si-substrate can provide a good radiation efficiency for the on-chip antenna. The balanced log periodic dipole antenna is fed by balance output of a balun bandpass filter (BPF). The simulated antenna power gain at 94GHz is 4 dBi (1.5 dBi with the integrated balun filter) and the radiation efficiency is 89 %. The measured power gain of the integrated antenna-filter is about 1.4 dBi at 94 GHz.