Research on a 6-DoF Magnetic Levitation System

This paper presents a high-precision magnetic levitation system with six degrees of freedom (6-DoF) required for many high technology areas such as semiconductor industry or nanotechnology. It is characterized by a very simple compact construction with a relatively low-power consumption of the magnetic guidance. Furthermore, it provides a freely accessible mover from above with decoupled levitation and propulsion forces. In order to determine the forces, acting on the moving permanent magnet, semi-analytical force equations will be derived. The calculated forces determined by the equations and the verification by 3D-FEM are presented in this paper as well.