Wideband Micromachined Antenna for W-band Applications

The paper proposes a 3x1 folded slot antenna with a coplanar waveguide feed, processed on a dielectric membrane fabricated through the Deep Reactive Ion Etching of a silicon substrate. The antenna is placed on a metallized silicon chip ensuring good mechanical stability and high gain. The resulting structure has an input matching bandwidth between 76 - 100 GHz, with a gain of 10.5 dBi at 94 GHz. The size of the fabricated chip is 6.7x7.2x1.3 mm³.