Dielectric Properties Engineering of Coplanar Waveguides on Porous Silicon up to 67 GHz

A study of dielectric properties of mesoporous silicon (PS) is presented. PS was prepared by electrochemical etching of a heavily doped P⁺⁺ silicon wafer in a hydrofluoric acid electrolyte. The morphology of PS and oxidized PS were both characterized by scanning electron microscope. The dielectric properties of PS and oxidized PS obtained by thermal treatment were characterized by a microwave method using coplanar waveguide (CPW) transmission lines (TL) up to 67 GHz.