Metrological Challenge for Scanning Microwave Microscopy

We have demonstrated a near-field scanning microwave microscopy (SMM) based on an atomic force microscopy (AFM) with interferometric circuits for characterization of high permittivity dielectric materials. Fixed impedance matching technique is generally used in commercial SMM product. We propose a passive interferometer circuit is applied to SMM system in prototype or laboratory level system. All system is useful for operators without knowledge of microwave measurements, but they have somewhat limitation of measurement range in order to characterization of high dielectric permittivity materials. Then, we demonstrate high-precision characterization for high permittivity dielectric materials by our SMM system with passive interferometric detection circuit.