2018 IEEE International Conference on Semiconductor Electronics (ICSE) Synthesis, Properties and Humidity Detection of Anodized Nb2O5 Films

Synthesis of nanoporous network Nb₂O₅has been conducted via anodization technique in the flouride-organic based solution. The structure morphology and the properties of the nanoporous films were characterized using field emission scanning electron microscopy (FESEM). In this research, a humidity sensor based on 1.5 micrometer thick nanoporous Nb₂O₅was developed and their performance was evaluated under 40% to 90% relative humidity at room temperature and different bias voltages of 2, 5 and 8 V. The highest relative sensitivity achieved was 156.2 for humidity sensor operated at bias voltage of 5 V.