Various Properties of Fe-Co Magnetic Films Prepared by PLD Method

Although a high speed PLD (Pulsed Laser Deposition) method is attractive in order to obtain thick film rare-earth permanent magnets such as Nd-Fe-B and Pr-Fe-B films applied to miniaturized devices [1] [2], the fundamental mechanism of the deposition process is still unclear. In this study, we focused on the preparation of Fe-Co films by using the PLD because a Fe-Co film has a simple binary-alloy-based composition. This contribution reports the relationship between the laser energy density (LED) of the PLD method and various values such as surface morphology, compositions and magnetic properties in PLD-fabricated Fe-Co films.