Silicon Adiabatic Waveguide Coupler Switch Using Lateral Comb Actuators

A matrix-type silicon photonic waveguide switch using adiabatic couplers with lateral comb-drive actuators is studied. One of the waveguides of the coupler is moved laterally by three actuators for switching. The movable waveguide is the tapered waveguide of the adiabatic coupler. The three actuators are ultra-small electrostatic comb-driven and move the connected tapered waveguides. The transmission of single switch was measured as a function of coupler gap. Around a coupler gap of 110 nm, the switch-on state was obtained. The resonant frequency of the movable part of switch was about 162.3 kHz.