1.7 GHz Y-Cut Lithium Niobate MEMS Resonators with FoM of336 andfQ of9.15×1012

This work presents a new class of microelectromechanical system (MEMS) resonators enabled by Y -cut lithium niobate (LiNbO
₃
) thin films. In operation, the devices are excited into the first order antisymmetric (A1) mode vibration. The fabricated MEMS resonator has demonstrated a large effective electromechanical coupling (\pmbk\pmbt
²
) of 6.3% and a high quality factor (Q) of 5341, hence resulting in an extremely high figure of merit (FoM = \pmbk\pmbt
²
·\pmbQ) of 336 at 1.7 GHz. Additionally, this work also marks the highest experimental/Q product of 9.15×10
¹²
Hz for state-of-the-art MEMS resonators based on transferred lithium niobate thin films.