A Novel TRM Calibration Method for Improvement of Modelling Accuracy at mm-wave Frequency

Ahstract-A novel TRM calibration procedure aimed to improve the quality of on-wafer S-parameter measurement, especially in mm-wave frequency band, has been proposed. This procedure is based on active reverse signal injections to improve the accuracy of the raw thru s-parameter measurement. This calibration method can effectively improve the S-parameter measurement quality at mm-wave frequency and hence improve the modelling accuracy. This new optimized calibration method eliminates the need of utilizing complex and expensive loadpull system or post calibration optimization algorithms, and can be easily implemented in modelling extraction process or further implemented into other LRL/TRL based calibration algorithms. Finally, this proposed method has been tested on a real measurement system over a 16nm FinFET CMOS device to test its validity.