Laser induced damage threshold of high reflective dielectric coatings on absorbing substrate

in this work the laser induced damage (LID) of HfO₂ / SiO₂ H Ta₂O₅ / SiO₂ coatings on SiC absorbing substrate is investigated. It is shown experimentally, that presence of vibration or microdisplacement of sample relatively to laser beam may lead to significant reduction of LID threshold. Numerical simulation of thermally induced stresses in silicon carbide substrate shows increase of thermally-induced stress in the presence of sample displacement.