A Concept of MEMS Mass Spectrometer

This paper presents the concept of a MEMS mass spectrometer, which integrates all necessary modules on single vacuum-sealed chip. Computer simulations and preliminary studies showed that the miniature mass spectrometer containing a high vacuum micropump, a sample injection system, an ion source, an analyzer and a detector is possible to obtain. The spectrometer performs analysis in vacuum of range of 10^-3 to 10^-5 hPa and we believe is able to distinguish all components at mass range of 1 to 100 units with reasonable accuracy.