Reserch on digital closed-loop control for silicon resonant accelerometer

This paper presents a design method of digital control unit of silicon resonant accelerometer. Compared to conventional analog control circuit, the digital control unit presented in this paper can increase the range of accelerator and has the advantage of flexibility. It contains of digital phase-locked loop used for frequency controlling and digital automatic gain control negative feedback loop to stabilize the amplitude of driving signal. The Simulink model of the digital control system is established, and the simulation results are analyzed. The result shows that, the system performances can meet the requirements of large range and high stability.