Accurate self-heating assessment employing multi-stage thermal RC network

Multi-stage thermal RC network is extracted and verified from transient thermal response by 3D FEM simulation to accurately capture self-heating. The impact of material parameters on temperature response is investigated. Furthermore, electro-thermal analysis of devices with different thermal conductivities is implemented to study the dependence of AC frequency and power duty cycle on self-heating. The results show that self-heating is suppressed when the heating time is shorter than the time constant of substrate even if poor thermal conductivity of substrate is adopted.