Levitation control system design for micromachined electrostatically suspended accelerometer

It is proposed in this paper a levitation control system which can be used in the suspension control of a micromachined electrostatically suspended accelerometer (MESA) to achieve steady control results. The MESA is designed in sandwich-like structure, and related fabrication technologies are introduced. The system design of levitation control is also presented which including the multiplex frequency detection way and six degree of freedom (DOF) control. The control voltages reflect the input acceleration. The control with bias voltage is used in the initial levitation along axial direction for the approximate linear model can be constructed near the null position. The design of the control system is also introduced including circuit design which including detection and control modules. The experiment results indicate that the detection way is reasonable and the pulse input acceleration simulation also proves that the MESA can act as accelerometer along axial direction with sensitivity of 2 V/g.