Measurement uncertainties in electrostatic actuated MEMS resonators

This paper presents the measurement uncertainty in electrostatically actuated MEMS resonator using frequency domain analysis (FFT). The influence of the applied driving force was studied to evaluate the measurement variations in resonant characters, like resonant frequency and quality factor of the resonator. To quantify the measurement uncertainties, measurements system analysis (MSA) was performed using analysis of variance (ANOVA) method. The results demonstrate that the resonant frequency is mostly affected by the systematic errors and is independent of the applied force strength. However, the quality factor strongly depends on the applied driving force.