Characterization of microstructures using white light diffraction phase microscopy

We present results from the characterization of microstructures using white light Diffraction Phase Microscopy technique, which combines the single shot imaging attributes of the off-axis geometry and speckle free imaging attribute of white light. A microscope with a halogen lamp and a Mach-Zehnder interferometer combined to obtain images of the specimen. A conventional phase reconstruction algorithm is applied to retrieve the phase information, which includes the unwrapping algorithm to avoid problem associated with the thick objects. We demonstrate 3D imaging and quantification of the depth of microstructures.