Micromachined dispenser with high flow rate and high resolution

A micromachined dispenser with a high flow rate and high resolution for chemical analysis is described. The flow rate as a function of the actuation frequency increases linearly up to a frequency of 700 Hz with a final value of about 148 /spl mu/l/s using water as a pump medium. The dispensing accuracy is better than 1% (coefficient of variance) at a dispensing volume of 56 /spl mu/l. This dispenser shows good dispensing performance thanks to its precise valve structure and surface-treated nozzle.