Microfluidic fabrication approach for atomic force microscope cantilevers with photocurable resins

This paper reports the systematic batch fabrication of atomic force microscope (AFM) cantilevers with various photocurable polymers by using an aligned polydimethylsiloxane (PDMS) mold assembly consisting of two PDMS molds; one exhibiting tips and beams and the other exhibiting bases and injection channels. The optimum injection pressure is obtained and realized by a precision electronic pressure regulator while the mold assembly maintains adhesion. After the mold assembly is filled with photocurable polymers, polyethyleneglycol diacrylate (PEGDA) MW250 and resins for stereolithography type 3D printing, and UV is exposed, the aligned mold assembly is simply separated and cured 40 polymeric AFM cantilevers are harvested simultaneously. After metal deposition, each polymeric AFM cantilever is separated from the batch and stored in a dry box. PEGDA AFM cantilevers are employed for force-displacement measurements on various substrates and imaging biological samples.