Anchor loss limited Q factor analysis of disk resonator for varying disk geometry

Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. With the increasing demand for high frequency, high Quality factor (Q factor) mechanical disk resonators, the Q factor declining issue at high frequency becomes increasingly prominent. In this paper the Quality factor of RF MEMS disk resonator at UHF for various materials using varying geometry is analyzed. It is found that as the Q factor increases the sensitivity of the device is improved with enhanced system performance. Anchor loss limited Q factor is obtained for the resonator using PML (Perfectly Matched Layer). Anchor losses occur when the vibration of the structure and its supporting anchors excite acoustic waves propagating in the substrate. The Q factor can be enhanced by optimizing the geometry such as disk diameter and disk thickness. The Q factor of disk resonator is analyzed at different Eigen frequency values using COMSOL Multiphysics.