Research on the multi-physics simulation and chip implementation of piezoelectric contour mode resonator

This paper introduces the operating principles of a piezoelectric contour-mode resonators, and analyzes the resonance process through multi-physics finite element analysis method. Compared with Modified Butterworth-Van-Dyke model equivalent circuit designed piezoelectric resonator, the multi-physics simulation can analyze the influence of each component on resonator performance, such as dimensions of resonator fixed position and thickness of upper and lower electrodes. The 140MHz contour mode resonator is designed based on the simulation and optimization results, and produced through MEMS technology; the test results indicate that the resonator possesses a higher Q value with an electromechanical coupling coefficient of 2%, which is basically consistent with the simulation results. The 140MHz contour mode filter is designed based on the resonator with a 3db bandwidth of 1MHz and a center insertion loss of 3.5db, which has a high rectangle coefficient and out-band suppression up to50db.