Arc-shaped cantilever beam RF MEMS switch for low actuation voltage

With last two decades, Radio Frequency (RF) Microelectromechanical system (MEMS) switches are becoming more popular in the electronics domain. Since power consumption has become the highest concern in many electronics devices. The main concern in using RF MEMS switches is its high actuation voltage. Thus this paper generally focuses on the analysis and simulation of RF MEMS metal contact switch having an arc-shaped cantilever beam to obtain the low actuation voltage. Simulations are done using the finite element modeling (FEM). Intellisuite 8.7v software has been used to get the results of the switch. The design has been modified according to thickness of the beam and air gap to carry out electrostatic actuation. The pull-in voltage is obtained to be 1.4 V.