Integral sliding mode tracking control of piezoelectric positioning platform with compensating hysteresis-observer

Piezoelectric positioning platform is widely applied in the micro-nano positioning field. However, the inherent hysteresis nonlinearity in piezoelectric materials seriously damages the positional accuracy of the platform. In this study, an integral sliding mode control with compensating hysteresis-observer is developed for high-precision positioning control of the piezoelectric positioning platform. Hysteresis-observer is used to estimate and compensate the hysteresis nonlinearity part of the platform. The observation errors and parameter uncertainties part are considered as external disturbance of systems, which are eliminated using the designed integral sliding mode controller. Then, the stability of the proposed control strategy is demonstrated using the Lyapunov stability theory. Finally, a series of tracking experiments are implemented on the piezoelectric positioning platform. Experimental results reveal that the proposed integral sliding mode control with compensating hysteresis-observer can achieve the high precision tracking control of the piezoelectric positioning platform.