Quick Technology for Fabrication of BiSrCaCuO Mesas and Its Application for Spectroscopy

The proposed technology of wet etching provides obtaining of stand-alone Bi
₂
Sr
₂
CaCu
₂
O
₈
mesa structures thicker than ones usually being studied, but still allows to get mesas below 1 μm. The time required for the fabrication is much shorter than the standard method of ion milling. The development of technology is aimed to increasing of the copper plating up to 30 microns thick over a thin gold layer to improve heat removal. The measurements of fabricated samples over a wide temperature range from 6 to 77 K were performed. Also experimental study of spectrometer with the oscillator based on the BSCCO mesa structure obtained on the basis of standard ion milling technology was performed. In particular the BSCCO generator can be used to develop compact THz spectrometer with high resolution.