Multi-layer semi-lumped filters on MCM-D

Multi-layer semi-lumped filters operating at 1.9 GHz are designed and implemented on MCM-D (multi-chip module-D) technology. Both high-resistivity silicon and ceramic substrates are used. The structure consists of only coplanar waveguide and capacitors. Inductors are purposely avoided with respect of their generally low Q factor. Comparison between silicon and ceramic, measured and simulated performances are made. The filter's insertion loss of 1.3 dB is achieved at 1.9 GHz on a ceramic substrate. The filter is designed for the study of system integration so that no external discrete filter is needed in RF-MCM applications.