MEMS electrostatic energy harvesting device with spray coated electret

This paper presents the design and measurement of electrostatic energy harvesting. A spray coated electret based electrostatic energy harvester with out-of-plane gap closing scheme is fabricated using advanced MEMS technology. The size of this device is 13×18 mm
²
. With the matched resistance of 21 MΩ, an output power of 12 μW is harvested when the resonant frequency is 154 Hz under the acceleration of 28.5 m/s
²
. The thermal stability of this device is tested on 100 °C, decent power can be output after 34 hours.