Piezoelectrically driven and sensed micromirrors with large scan angles and precise closed-loop control

This paper reports piezoelectrically driven and sensed micromirrors achieving extremely large total optical scan angle of 106deg and high frequency of 45 kHz at 22 V. To reach such large angles, extensive FEM-simulations relating to fracture strength of poly-Si, of which these micromirrors primarily consist, have been performed. Meanwhile, high Q-factor of more than 5000 under ambient conditions and low power consumption of 10.3 mW were measured. Moreover the piezoelectric elements enable position sensing and based on the feedback signals closed-loop control has been developed.